Flow Controller for Air PFCQ
| Series | Rated control flow rate range [L/min] (Dry air, N₂, Ar) |
Set control flow rate range [L/min] (Dry air, N₂, Ar) |
|---|---|---|
| PFCQ | 9 to 300 | 3 to 300 |
| Series | Rated control flow rate range [L/min] (Dry air, N₂, Ar) |
Set control flow rate range [L/min] (Dry air, N₂, Ar) |
|---|---|---|
| PFCQ | 9 to 300 | 3 to 300 |