Flow Controller for Air PFCA7
| Series | Rated control flow rate range [L/min] (Dry air, N₂, Ar) |
Set control flow rate range [L/min] (Dry air, N₂, Ar) |
Set control flow rate Min. unit [L/min] |
|---|---|---|---|
| PFCA710 | 0.1 to 10 | 0.04 to 10.3 | 0.01 |
| PFCA725 | 0.2 to 25 | 0.1 to 25.8 | 0.1 |
| PFCA750 | 0.5 to 50 | 0.2 to 51.5 | 0.1 |
| PFCA711 | 1 to 100 | 0.4 to 103 | 0.1 |