Series Rated flow range (L/min)
PF2M7 0.01 to 1 (0.01 to 0.5)
0.02 to 2 (0.02 to 1)
0.05 to 5 (0.05 to 2.5)
0.1 to 10 (0.1 to 5)
0.3 to 25 (0.3 to 12.5)
0.5 to 50 (0.5 to 25)
1 to 100 (1 to 50)
2 to 200 （2 to 100） (　): For CO2