Clean Exhaust Filter SFE
| Series | Filtration (μm) | Maximum flow capacity L/min (ANR) | Port size |
| SFE | 0.01 (Filtration efficiency: 99.99%) | 3，30，65，130，200 | M5 x 0.8，R1/8，R1/4 φ4，φ6，φ8，φ10 |
| Series | Filtration (μm) | Maximum flow capacity L/min (ANR) | Port size |
| SFE | 0.01 (Filtration efficiency: 99.99%) | 3，30，65，130，200 | M5 x 0.8，R1/8，R1/4 φ4，φ6，φ8，φ10 |