SeriesFlow rate characteristics
2→3(A→R)
C[dm3/(s・bar)]
Flow rate characteristics
2→3(A→R)
b
Flow rate characteristics
2→3(A→R)
Cv
Power
consumption
(W)
For use
in vacuum
applications
VQZ1000.560.300.140.35(Standard)
0.9(High pressure type,
High speed response type)
-100 kPa
VQZ2001.70.360.450.35(Standard)
0.9(High pressure type,
High speed response type)
-100 kPa
VQZ3003.00.330.720.35(Standard)
0.9(High pressure type,
High speed response type)
-100 kPa