SeriesTypeFlow rate characteristics
2→3 (2→1)
C[dm3/(s・bar)]
Flow rate characteristics
2→3 (2→1)
b
Flow rate characteristics
2→3 (2→1)
Cv
Power
consumption
(W)
For use
in vacuum
applications
VQ100Standard

Large flow capacity
0.083

0.14
0.28

0.25
0.021

0.036
1.0
0.5 (Low wattage type)
-100 kPa