SeriesTypeFlow rate characteristics
2→3
C[dm3/(s・bar)]
Flow rate characteristics
2→3
b
Flow rate characteristics
2→3
Cv
Power
consumption
(W)
For use
in vacuum
applications
V100Standard0.0370.110.0080.35 (Standard)
0.1 (With power-saving circuit)
-100 kPa
V100Large flow0.0760.070.0161-100 kPa
V100Large flow (Type U)0.160.180.0380.35 (With power-saving circuit)-100 kPa