SeriesFlow rate characteristics
2→3(A→R)
C[dm3/(s・bar)]
Flow rate characteristics
2→3(A→R)
b
Flow rate characteristics
2→3(A→R)
Cv
Power
consumption
(W)
For use
in vacuum
applications
SYJ3000.360.310.0890.35(Standard)
0.1(With power saving circuit)
-100 kPa
SYJ5001.20.480.340.35(Standard)
0.1(With power saving circuit)
-100 kPa
SYJ7002.70.340.690.35(Standard)
0.1(With power saving circuit)
-100 kPa